Semitron® ESd Family of Products

Semitron® ESd Family of Products

Semitron® MPR 1000

• Excellent heat resistance

• Lowest cost plastic solution that also provides the highest level of performance

in the chamber

• Low rate of erosion in plasma chambers

Applications : Plasma Based Vacuum Chambers, Clamp Rings, Trench Rings, Screws,

Pins, Shower Heads, Focus Rings, Insulators, Vacuum Pads

Semitron® MP 370

• Very low moisture absorption

• Strength and stiffness that exceed unfilled PEEK materials

• Excellent machinability

Applications : IC Test Sockets, Insulating Blocks and Fixtures, Structural Parts for

Semiconductors Manufacturing Equipment

Semitron® MDS 100

• Moisture absorption of .10% at 24 hrs. (per ASTM D570)

• Thermal performance to 410°F (210°C)

• Flexural modulus > 1,400,000 psi

Applications : Test Sockets, Fixtures for Electronic Testing, Mounting Points

Semitron® ESd 225

• Surface resistivity: 1010 - 1012 ohms/sq.

• Thermal performance to 225°F (107°C)

Applications : Wafer Combs, Hard Disk Drive Fixtures

Semitron® ESd 410C

• Low stress for tight tolerance machining

• High strength and stiffness

• Thermal performance to 410°F (210°C)

Applications : Handling Trays

Semitron® ESd 420

• Only, truly dissipative plastic product for use in high temperature applications

• Surface resistivity: 106 - 109 ohms/sq.

• Thermal performance

Applications : Test Sockets for IC Chips, Probe Card Components

Semitron® ESd 420V
• Dissipative performance of 106 - 109 ohms/sq
• No dimensional change as a result of exposure to moisture
• Cost Effective alternative
Applications : Test Sockets for IC Chips, Probe Card Components

Semitron® ESd 480
• Very dimensionally stable
• Exceptional chemical resistance
• Not subject to dielectric breakdown
Applications : Critical Test Fixtures, Wafer Handling, Test Sockets for IC Chips

Semitron® ESd 490HR
• Surface resistivity: 1010 - 1012 ohms/sq
• Higher resistivity PEEK
Applications : Critical Test Fixtures, Wafer Handling, Test Sockets for IC Chips, Inserts

Semitron® ESd 500HR
• Thermal performance to 500°F (260°C)
• Very low coefficient of friction
• Broad chemical resistance
• Thermal performance to 500°F (260°C)
Applications : Inserts, Sockets for Test Equipment

Semitron® ESd 520HR
• Combination of electrostatic dissipation (ESd), high strength and heat resistance
• Resist dielectric breakdown at high voltages (>100V)
Applications : Nests, Sockets and Contractors for Test Equipment and Other Device
Handling Components, IC Device Testing Fixtures

Semitron® CMP LL5
• Long life material - up to 5x PPS
• Ideal for CMP applications up to 140°F (60°C)
• Best performance in oxide chemistries - up to 8x PPS

Applications : CMP Applications

Semitron® CMP XL 20
• Significantly lower cost per wafer
• Outperforms PPS up to 20x in most processes
• High strength and stiffness promotes fewer edge defects and better uniformity
Applications : Etch and CVD Chamber Applications, CMP Applications