Hony Engineering Plastics Limited
Hony Engineering Plastics Limited
Home> Semiconductor Electronics

Semiconductor Electronics

Semiconductor electronics


The production of integrated circuit chips requires highly specialized equipment that can work in multiple harsh environments, such as:

● Plasma in a vacuum environment;

● high temperature;

● contact with highly abrasive liquid;

● Exposure to many highly corrosive chemicals.

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Advantage


● Exact reproduction of material available anywhere in the world

● Extensive material selection, engineering support and testing capabilities

● Machining capability, supporting NPI application development of simulation system

● Broadest portfolio of materials designed for wet process tools

● World-leading manufacturer of CMP ring materials, including Techtron® PPS (global standard for CMP applications)

● Materials used in dry process tools such as etch, CVD and ion implantation to reduce cost and improve performance


Common Materials

Acetal

Anti-static , static dissipative , and conductive plastics

CPVC

FEP

Fluoropolymer tubing

FR Polypropylene

ECTFE

PVDF

NYLON

PEEK

PET

PFA

Polyimide tape

PC

Polypropylene

PSU

PPS

PTFE

PEI

Epoxy

Phenolic cotton cloth

Durostone

FR4/G10

Bakelite


Materials Strength

Ø Static dissipative grades

Ø Chemical resistance

Ø Low particle generation in bearing and wear applications

Ø Low outgassing characteristics

Ø Low levels of extractable when placed in high purity chemicals

Ø High temperature capabilities

Ø Dimensional stabilities


Typical Applications

Bearings and bushings

Chemical tanks

Electrical insulators

Flexible tubing

Guards and shields

Polishing rings

Spin chucks

Static control applications

Test sockets

Valve components

Wafer handling parts

Wet benches and work stations

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Products and Applications

Product Application
Techtron®PPS CMP ring
Semitron®CMP XL20
Etching and CVD reaction chamber
Ketron®1000 PEEK
Wafer transfer
Ertalyte®PET-P
Wet process structure
Duratron®PAI
Wet process components , HP Chemical and Water Storage Container Liners


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