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Conductive Anti-Static Plastics Commonly Used in Semiconductor Applications

August 06, 2024
Conductive antistatic plastics continue to help semiconductor industry
 
Nowadays, more and more electronic devices are being used in our lives, which means that silicon wafers (the semiconductor material used by electronic device manufacturers) need to be manufactured more often. Conductive anti-static plastics play an important role in protecting wafers from contamination and breakage during transportation and production.
 
Wafer transportation and processing product function is largely affected by the materials used, so it is very important to choose the right material for the product, we need to understand the specific requirements of the product, choose the material that can meet its functional properties, such as mechanical strength, wear resistance, heat resistance, chemical resistance, in addition to the choice of semiconductor packaging and transportation materials we need to pay special attention to the conductive anti-static properties of the material. Through the selection of different characteristics of the basic plastic resin, to get different characteristics of the resin function, and then through the addition of glass fiber, antistatic agent, carbon fiber or carbon black, etc. to give the basic resin does not have other characteristics of the original color, such as heat resistance, conductivity or higher strength and toughness. These combinations of features can be based on different combinations of base resins making the possibilities endless.
 
 
Conductive antistatic plastics commonly used in semiconductor applications, such as PP , PC , ABS, PS, PBT, PPO, PPS , PEI , PEEK , etc..
 
For example, PFA or PVDF (insulating materials) are usually used for cleaning wafer boats, because fluoroplastics have excellent chemical resistance and ultra-high cleanliness, which prevents the contamination of wafers during the cleaning process. Such as baking with semiconductor carriers we would recommend customers to use PEEK, PEI, PPS, PPO plus carbon fiber CF and carbon nanotubes CNT composite materials, surface resistivity can be customized 10E3-11 ohms, because these materials have excellent chemical resistance and good heat resistance, to withstand the high temperature of the baking oven. And ordinary turnover semiconductor carriers using PP, ABS, PS, PBT, PA, PC plus polymer or carbon fiber or carbon black modification scheme, these materials have a good cost-effective, and can meet the transparency or color customization needs.
 
Different conductive anti-static filler is also adapted to the production of different semiconductor parts, polymer antistatic compounds because of the light base color, added to the plastic substrate can be customized into different colors and transparency of the anti-static plastic, the production of products can be differentiated according to the different colors of the product state, which facilitates the semiconductor parts in the process of sub-station management, improve production efficiency; carbon fiber high performance gives the carbon fiber The high performance of carbon fiber gives the carbon fiber conductive Antistatic Material higher strength and better heat resistance; carbon nanotubes low additive ratio can achieve good conductive antistatic products, so that products to meet the requirements of low pollution, high impact performance; and carbon black conductive antistatic material is a low-cost solution, is a large number of applications in semiconductor packaging carriers, has a very good economic benefits.
 
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PP material as life is very common plastic materials, with low material costs, very low specific gravity, weldable performance is good, good impact resistance, good bending performance, with transparent or translucent color, and PP material for inorganic strong acids, alkalis, alcohols and other solvents show excellent chemical resistance.
However, PP polypropylene has poor heat resistance, low hardness, low bending strength, poor warping resistance, easy to deform, and poor chemical resistance to heated chlorinated solvents, aromatic solvents, concentrated hydrochloric acid or hydrogen peroxide.
PP polypropylene material by adding carbon black, polymer long-lasting antistatic masterbatch, carbon fiber and other conductive anti-static PP materials are commonly used in the manufacture of semiconductor packaging and shipping containers.
PP black conductive anti-static materials can be used for single piece of horizontally placed wafer box, multiple pieces of horizontally placed wafer box, multiple pieces of horizontally placed wafer canisters, ring isolation ring piece, wafer carrying tray wafer boat, multiple pieces of vertical wafer boat box, photomask shipping box, wafer trays, tray clips, card boxes, tray card strips and so on;
PP natural color transparent anti-static material can be used for single chip horizontal packaging box, multi chip horizontal placement of wafer canisters, multi chip vertical wafer boat box, wafer carrying tray wafer boat, tray clips, clips for process control table, card boxes, tray card strips, etc.;
PP carbon fiber conductive anti-static material can be used for multi-chip vertical wafer boat box trays, etc..
 
PS polystyrene is divided into GPPS (excellent dimensional stability, good transparency, hard with brittleness) and HIPS (improved impact strength, good stress resistance, better softness), PS is low cost, good processability, strong resistance to water, weak acids, alkali bases and detergents.
However, PP has lower impact strength even after improved impact, poor heat resistance, and is susceptible to corrosion by most solvents and organics.
By adding carbon black to PS materials, polymer long-lasting antistatic masterbatch, etc. obtained by the conductive antistatic PS materials are commonly used in injection molding or extrusion molding production of semiconductor packaging and transportation containers without heat-resistant requirements.
GPPS transparent antistatic materials can be used for transparent photomask boxes, wafer trays with masks, self-absorption boxes, etc.;
HIPS black conductive anti-static plastic can be used for wafer trays, single wafer packaging blister, extrusion carrier tape, tape reels and so on.
 
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ABS Acrylonitrile Butadiene Styrene Copolymer
ABS is a general-purpose plastic that combines strength, toughness, and impact resistance with natural or transparent colors, high impact strength, and easy color matching. It is resistant to almost all acids, bases, saturated brines and alcohols.
However, ABS is generally heat-resistant and is susceptible to corrosion by organic solvents.
Through the addition of carbon black to ABS materials, polymer long-lasting antistatic masterbatch obtained conductive antistatic ABS materials are commonly used in the manufacture of semiconductor packaging and transportation containers that do not require high heat resistance.
ABS transparent antistatic material can be used for multi-chip vertical wafer boat box, transparent mask transfer box, transparent mask shipping box, wafer tray with mask, self-absorption box, and so on;
ABS black conductive anti-static plastic can be used for wafer trays, waffle boxes, packaging trays for optical parts, etc.
 
PC is a hard transparent polymer with high heat resistance, excellent impact resistance and strength, and high transparency, good dimensional stability, not easy to stress deformation, good weathering performance, it is resistant to weak acids, alkali base, oil, alcohol at room temperature.
However, PC material is easy to internal stress cracking, in high temperature will be organic solvents, strong acid and alkali base erosion.
By adding carbon black, carbon nanotubes, polymer long-lasting antistatic masterbatch, carbon fibers and other conductive and antistatic PC materials obtained through the addition of PC materials are commonly used in the manufacture of semiconductor packaging and shipping containers with certain heat-resistant requirements.
PC ordinary transparent plastic can be used for transparent multi-piece vertical crystal boat box, transparent photomask transmission box;
PC black conductive anti-static plastic can be used for wafer carrying tray wafer boat, multi-chip vertical wafer boat box, photomask shipping box, wafer tray, self-absorption box, etc.;
PC carbon fiber conductive anti-static plastic can be used for wafer isolation ring, multi-chip vertical wafer boat box, etc..
 
 
 
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PBT Polybutylene Terephthalate
PBT has good heat resistance and low water absorption.
However, PBT is not resistant to strong acids and alkalis, and is resistant to organic solvents.
PBT natural color anti-static plastic can be used for wafer carrying tray wafer boat, multi-chip vertical wafer boat box, and so on.
 
PPO Polyphenylene Ether
Pure PPO is generally white or light yellow powder, poor melt fluidity, prone to stress cracking, low notched impact strength, unable to injection molding. Through and PS and other materials composite improvement to improve the fluidity of the material, can be injection molding, the current general is MPPO, that is, PPO + PS. MPPO has a low water absorption, low specific gravity, good dimensional stability, and has good heat resistance.
However, the low percentage of PS in the heat-resistant grade MPPO drastically reduces its fluidity.
The conductive and anti-static PPE materials obtained by adding carbon black, carbon nanotubes, carbon fibers, etc. to MPPO materials are commonly used in the manufacture of semiconductor packaging and shipping containers with certain heat-resistant requirements and high dimensional stability requirements.
PPO carbon black / carbon fiber conductive anti-static plastic is mainly used in the production process of a variety of high-temperature trays that need to be cleaned and baked.
 
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PA Polyamide Nylon
Nylon PA has good toughness and excellent heat resistance, and has good mechanical strength.
However, the nylon material is easily deformed and warped after absorbing moisture, which cannot meet the requirements of semiconductor carrier precision.
By adding glass fiber and long-lasting antistatic masterbatch to the PA material can be color-matched antistatic PA material is commonly used in the manufacture of certain heat resistance requirements, toughness and can be adjusted to the color of the semiconductor carrier accessories, such as color-coded color visual management of the tray with the card strips, the state of the identification of the card slots, a variety of handles and so on.
 
PPS polyphenylene sulfide material is hard and brittle, with very good rigidity, excellent heat resistance, long-term workload and thermal load can maintain high mechanical properties and dimensional stability, excellent chemical resistance.
However, PPS has high specific gravity and relatively high cost.
By adding carbon nanotubes to the PPS material, carbon fibers and other conductive anti-static PPS materials are commonly used in the manufacture of high and low temperature requirements, corrosion-resistant process used in the semiconductor packaging and shipping containers and equipment parts.
PPS black conductive anti-static plastic is mainly used in the production process of a variety of high and low temperature resistance, chemical cleaning semiconductor trays and semiconductor automated production line of anti-static conductive mechanical parts.
 
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PEI Polyetherimide
PEI materials have excellent strength-to-weight ratios, high impact strength, good heat resistance, and resistance to high-temperature steam, and good resistance to a wide range of chemicals.
The conductive and antistatic PEI materials obtained by adding carbon nanotubes and carbon fibers to PEI materials are commonly used in the manufacture of semiconductor packaging and shipping containers as well as equipment parts used in processes requiring high and low temperatures and corrosion resistance.
PEI amber transparent mainly used in the production process of a variety of high and low temperature resistance, chemical cleaning resistance of the wafer carrying tray wafer boat, multi-piece vertical wafer boat box.
PEI black conductive and anti-static plastic is used for the production of wafer carrier tray wafer boat, multi-chip vertical wafer boat box, semiconductor tray, semiconductor automated production line of anti-static conductive mechanical parts.
 
PEEK polyether ether ether ketone mechanical properties, heat resistance, abrasion resistance and chemical resistance are outstanding, and has superior dimensional stability and flame retardant properties. What limits the use of PEEK is the cost.
Because of PEEK ultra-high comprehensive characteristics, so by adding carbon nanotubes to the PEEK material, carbon fibers and other conductive antistatic PEEK material is commonly used in the manufacture of high and low temperature requirements, corrosion-resistant process used in the semiconductor fixtures and tools.
PEEK black conductive anti-static plastic is mainly used in the production of semiconductor automated production line wafer carrying tray wafer boat, wafer pickup, adsorber, etc..
 
Fluoroplastic PFA PVDF
Fluoroplastics have unparalleled chemical resistance, able to withstand strong acids and alkalis in the semiconductor process, and have a high degree of crystallinity and excellent heat resistance.
Fluoroplastics PFA and PVDF are mainly used in the production of wafer carrying trays and wafer boats in semiconductor automated production lines.
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